Title:
MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2004/070408
Kind Code:
A1
Abstract:
A small-sized, lightweight, highly-sensitive magnetic sensor with a simple sensing signal processing circuit. The sensor can be used as a portable direction sensor. The magnetic sensor comprises a piezoelectric body (102) which is provided on a major surface of a substrate (103) serving as a support and on which a magnetostrictive thin film (101) is formed. The magnetic sensor has a magnetostrictive element composed of a sensor structure (106) comprising a generally plate-shaped multilayer body having an electrode led out of the piezoelectric body (102). While the sensor structure (106) is mechanically vibrating as one piece because of the voltage applied to the piezoelectric body (102), the mechanical resonance frequency of the sensor structure (106) varies with a change of the external magnetic field (113), and the strength of the external magnetic field (113) is calculated from the amount of change of the resonance frequency.
Inventors:
SHIMADA YUTAKA (JP)
HAYASAKA JUNICHI (JP)
OKAMOTO KOICHI (JP)
IKEDA YOSHIAKI (JP)
HAYASAKA JUNICHI (JP)
OKAMOTO KOICHI (JP)
IKEDA YOSHIAKI (JP)
Application Number:
PCT/JP2004/001098
Publication Date:
August 19, 2004
Filing Date:
February 04, 2004
Export Citation:
Assignee:
NEC TOKIN CORP (JP)
SHIMADA YUTAKA (JP)
HAYASAKA JUNICHI (JP)
OKAMOTO KOICHI (JP)
IKEDA YOSHIAKI (JP)
SHIMADA YUTAKA (JP)
HAYASAKA JUNICHI (JP)
OKAMOTO KOICHI (JP)
IKEDA YOSHIAKI (JP)
International Classes:
G01R33/02; H01L41/22; H01L41/47; (IPC1-7): G01R33/02
Foreign References:
| JPS58174809A | 1983-10-13 | |||
| GB2188157A | 1987-09-23 | |||
| JPS6338190A | 1988-02-18 | |||
| JP2000065908A | 2000-03-03 |
Attorney, Agent or Firm:
Goto, Yosuke (4-10 Nishishinbashi 1-chom, Minato-ku Tokyo 03, JP)
Download PDF:
Previous Patent: DETECTION DEVICE, DETECTION METHOD, AND PROGRAM
Next Patent: MR VISUALIZATION OF INTERVENTIONAL DEVICES
Next Patent: MR VISUALIZATION OF INTERVENTIONAL DEVICES