Title:
MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2017/199787
Kind Code:
A1
Abstract:
This magnetic sensor is equipped with: a substrate (110), which has an upper surface (111), and which is provided with a trench section (112) having an inner surface connected to the upper surface (111); and a first magnetoresistive element and a second magnetoresistive element, which are provided on the substrate (110), and which constitute a bridge circuit by being connected to each other. The first magnetoresistive element is configured from a magnetic film (120) continuously covering a part of the upper surface (111) and the inner surface. The second magnetoresistive element is configured from the magnetic film (120) covering another part of the upper surface (111).
Inventors:
NANBA HIROAKI (JP)
Application Number:
PCT/JP2017/017474
Publication Date:
November 23, 2017
Filing Date:
May 09, 2017
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
G01R33/09; H01L43/08
Domestic Patent References:
WO2014156751A1 | 2014-10-02 | |||
WO2015182365A1 | 2015-12-03 | |||
WO2016013345A1 | 2016-01-28 |
Foreign References:
US20100327864A1 | 2010-12-30 | |||
US20140159717A1 | 2014-06-12 | |||
CN104681713A | 2015-06-03 | |||
US20050270020A1 | 2005-12-08 | |||
US20060171081A1 | 2006-08-03 | |||
JP2009222650A | 2009-10-01 | |||
US20150349243A1 | 2015-12-03 | |||
CN105261699A | 2016-01-20 | |||
CN105304811A | 2016-02-03 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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