Title:
MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2020/084953
Kind Code:
A1
Abstract:
[Problem] The objective of the present invention is to provide a magnetic sensor with which it is possible to reduce 1/f noise by causing a magnetic path to be displaced mechanically, without using a MEMS structure requiring high-temperature processing.
[Solution] A magnetic sensor according to the present invention is provided with: magnetic layers M11, M21; a sensor chip 10 including a magnetosensitive element R1 provided on a magnetic path formed by means of a magnetic gap G1 between the magnetic layers M11, M21; and a mechanical drive portion 30 bonded to the sensor chip 10 by way of a bonding agent 50. The mechanical drive portion 30 includes a fixed region 30a fixed to the sensor chip by way of the bonding agent 50, and a displacement region 30b which is displaced by means of the application of a drive voltage. According to the present invention, since the construction is such that the mechanical drive portion is fixed to the sensor chip by means of the bonding agent, it is not necessary to carry out high-temperature processing after the magnetosensitive element has been formed. A reduction in 1/f noise can therefore be achieved while preventing a deterioration in the characteristics of the magnetosensitive element as a result of high-temperature processing.
Inventors:
FUKUI TAKATO (JP)
KASAJIMA TAMON (JP)
KASAJIMA TAMON (JP)
Application Number:
PCT/JP2019/036013
Publication Date:
April 30, 2020
Filing Date:
September 13, 2019
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
G01R33/02; G01R33/09; H01L43/02; H01L43/08
Domestic Patent References:
| WO2017204151A1 | 2017-11-30 | |||
| WO2008146809A1 | 2008-12-04 | |||
| WO2010091846A2 | 2010-08-19 |
Foreign References:
| JP2015203647A | 2015-11-16 | |||
| JPH10260147A | 1998-09-29 | |||
| JP2008309571A | 2008-12-25 |
Other References:
VALADEIRO, JOAO: "Hybrid Integration of Magnetoresistive Sensors with MEMS as a Strategy to Detect Ultra-Low Magnetic Fields, Micromachines", MICROMACHINES, vol. 7, no. 88, 11 May 2016 (2016-05-11), pages 1 - 20, XP055710538
Attorney, Agent or Firm:
WASHIZU Mitsuhiro et al. (JP)
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