Title:
MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/131606
Kind Code:
A1
Abstract:
[Problem] To reduce the 1/f size of a magnetic sensor. [Solution] A magnetic sensor according to the present invention comprising: a sensor chip 10 that includes a magnetosensitive element R; external magnetic bodies 21, 22 that form a magnetic gap G1; and a MEMS chip 30. The MEMS chip 30 includes a displacement region 31 that overlaps the magnetic gap G1, and a support region 32 that elastically supports the displacement region 31. The displacement region 31 includes a bypass magnetic body layer B, the displacement region 31 and/or the support region 32 includes a piezoelectric body layer 41, and the distance between the magnetic gap G1 and the bypass magnetic body layer B varies due to the voltage applied to the piezoelectric body layer 41. In the present invention, the sensor chip 10 and the MEMS chip 30 are separate chips, and therefore manufacturing cost can be suppressed, and 1/f size can be reduced while preventing deterioration of characteristics of the magnetosensitive element due to high-temperature processes.
Inventors:
KASAJIMA TAMON (JP)
FUKUI TAKATO (JP)
ONODERA IKUHITO (JP)
LIN CHENGBIN (JP)
FUKUI TAKATO (JP)
ONODERA IKUHITO (JP)
LIN CHENGBIN (JP)
Application Number:
PCT/JP2020/045212
Publication Date:
July 01, 2021
Filing Date:
December 04, 2020
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
H01L43/08; G01R33/06
Domestic Patent References:
| WO2020084953A1 | 2020-04-30 |
Foreign References:
| US20130096825A1 | 2013-04-18 | |||
| US20140184213A1 | 2014-07-03 | |||
| US20120206134A1 | 2012-08-16 | |||
| JP2020187084A | 2020-11-19 | |||
| JP2020187085A | 2020-11-19 |
Other References:
HU, JIAFEI ET AL.: "1/f noise suppression of giant magnetoresistive sensors with vertical motion flux modulation", APPLIED PHYSICS LETTERS, vol. 100, 11 June 2012 (2012-06-11), pages 244102, XP012156601, DOI: 10.1063/1.4729427
A. GUEDES ; S.B. PATIL ; P. WISNIOWSKI ; V. CHU ; J.P. CONDE ; P.P. FREITAS: "Hybrid Magnetic Tunnel Junction-MEMS High Frequency Field Modulator for 1/f Noise Suppression", IEEE TRANSACTIONS ON MAGNETICS, IEEE SERVICE CENTER, NEW YORK, NY, US, vol. 44, no. 11, 1 November 2008 (2008-11-01), NEW YORK, NY, US, pages 2554 - 2557, XP011240030, ISSN: 0018-9464, DOI: 10.1109/TMAG.2008.2003539
A. GUEDES ; S.B. PATIL ; P. WISNIOWSKI ; V. CHU ; J.P. CONDE ; P.P. FREITAS: "Hybrid Magnetic Tunnel Junction-MEMS High Frequency Field Modulator for 1/f Noise Suppression", IEEE TRANSACTIONS ON MAGNETICS, IEEE SERVICE CENTER, NEW YORK, NY, US, vol. 44, no. 11, 1 November 2008 (2008-11-01), NEW YORK, NY, US, pages 2554 - 2557, XP011240030, ISSN: 0018-9464, DOI: 10.1109/TMAG.2008.2003539
Attorney, Agent or Firm:
WASHIZU Mitsuhiro et al. (JP)
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