Title:
MAGNETISM DETECTING DEVICE AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2017/094889
Kind Code:
A1
Abstract:
[Problem] To provide a magnetism detecting device for detecting the magnetism in each of the X-Y-Z directions by forming magnetoresistive effect elements on inclined side surfaces of recessed sections formed in a substrate and a method for manufacturing the same. [Solution] A Z detecting section (10) is provided with magnetoresistive effect elements (40) (R1, R2, R3, R4) on inclined side surfaces (13, 14) of Z detecting recessed sections (11A, 11B), an X detecting section (20) is provided with magnetoresistive effect elements (40) (R5, R6, R7, R8) on inclined side surfaces (23, 24) of X detecting recessed sections (21A, 21B), and a Y detecting section (30) is provided with magnetoresistive effect elements (40) (R9, R10, R11, R12) on inclined side surfaces (33, 34) of Y detecting recessed sections (31A, 31B). The fixed magnetization (P) of a fixed magnetic layer of each of the magnetoresistive effect elements (40) is determined in the directions indicated by the solid line arrows.
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Inventors:
UMETSU EIJI (JP)
Application Number:
PCT/JP2016/085921
Publication Date:
June 08, 2017
Filing Date:
December 02, 2016
Export Citation:
Assignee:
ALPS ELECTRIC CO LTD (JP)
International Classes:
G01R33/09; G01R33/02; H01L43/08
Foreign References:
| US20090027048A1 | 2009-01-29 | |||
| JP2015175620A | 2015-10-05 | |||
| US20140266187A1 | 2014-09-18 | |||
| JP2013518273A | 2013-05-20 | |||
| JP2016072554A | 2016-05-09 | |||
| JP2016072555A | 2016-05-09 |
Other References:
See also references of EP 3385740A4
Attorney, Agent or Firm:
NOZAKI, Teruo (JP)
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