Title:
MAGNETO-OPTICAL THIN FILM, OPTICAL ISOLATOR, AND METHOD FOR MANUFACTURING MAGNETO-OPTICAL THIN FILM
Document Type and Number:
WIPO Patent Application WO/2023/030397
Kind Code:
A1
Abstract:
A magneto-optical thin film, an optical isolator, and a method for manufacturing a magneto-optical thin film. The magneto-optical thin film (100) comprises: a substrate (101); a diffusion barrier layer (102) provided on the substrate (101), the diffusion barrier layer (102) comprising a metal oxide; a buffer layer (103) provided on the diffusion barrier layer (102); and a light isolation layer (104) provided on the buffer layer (103). The metal oxide in the diffusion barrier layer (102) grown on the substrate (101) is polycrystalline, and therefore facilitates more the nucleation of the buffer layer (103) on the diffusion barrier layer (102), and has good crystallinity. In addition, the metal oxide has relatively high density and thermal stability, a stable and reliable diffusion barrier effect can be provided, and the optical loss of the magneto-optical thin film (100) is further reduced.
Inventors:
CHEN RONG (CN)
CAO KUN (CN)
XIONG YINGFEI (CN)
JIN ZERUI (CN)
ZHOU HUAJUN (CN)
LI HAOHUA (CN)
ZHANG BIN (CN)
CAO KUN (CN)
XIONG YINGFEI (CN)
JIN ZERUI (CN)
ZHOU HUAJUN (CN)
LI HAOHUA (CN)
ZHANG BIN (CN)
Application Number:
PCT/CN2022/116269
Publication Date:
March 09, 2023
Filing Date:
August 31, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
G02F1/09; C30B29/28; C30B29/16
Foreign References:
| CN109440071A | 2019-03-08 | |||
| CN113741068A | 2021-12-03 | |||
| CN105714379A | 2016-06-29 | |||
| JPH06196018A | 1994-07-15 | |||
| CN202111040113A | 2021-09-06 |
Other References:
ZHANG, YAN: "Research on Silicon Integrated YIG-based Magneto-optical Thin Films and Optical Isolators", INFORMATION & TECHNOLOGY, CHINA DOCTORAL DISSERTATIONS FULL-TEXT DATABASE, 1 October 2019 (2019-10-01), CN, pages 1 - 122, XP009544148, DOI: 10.27005/d.cnki.gdzku.2019.000044
SUNG, S. Y. ET AL.: "Magneto-Optical Garnet Waveguides on Semiconductor Platforms:Magnetics, mechanics, and photonics", J. APPL. PHYS., vol. 109, no. 7, 11 March 2011 (2011-03-11), XP012148310, DOI: 10.1063/1.3556781
STADLER B J H, GOPINATH A: "MAGNETO-OPTICAL GARNET FILMS MADE BY REACTIVE SPUTTERING", IEEE TRANSACTIONS ON MAGNETICS, IEEE, USA, vol. 36, no. 06, 1 November 2000 (2000-11-01), USA, pages 3957 - 3961, XP001044082, ISSN: 0018-9464, DOI: 10.1109/20.914347
SUNG, S. Y. ET AL.: "Magneto-Optical Garnet Waveguides on Semiconductor Platforms:Magnetics, mechanics, and photonics", J. APPL. PHYS., vol. 109, no. 7, 11 March 2011 (2011-03-11), XP012148310, DOI: 10.1063/1.3556781
STADLER B J H, GOPINATH A: "MAGNETO-OPTICAL GARNET FILMS MADE BY REACTIVE SPUTTERING", IEEE TRANSACTIONS ON MAGNETICS, IEEE, USA, vol. 36, no. 06, 1 November 2000 (2000-11-01), USA, pages 3957 - 3961, XP001044082, ISSN: 0018-9464, DOI: 10.1109/20.914347
Attorney, Agent or Firm:
KING & WOOD MALLESONS (CN)
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