Title:
MAGNETRON, MAGNETRON CATHODE BODY MANUFACTURING METHOD, AND CATHODE BODY
Document Type and Number:
WIPO Patent Application WO/2010/032772
Kind Code:
A1
Abstract:
It is possible to obtain a cathode body which can maintain a long service life even when a large current has flown. Provided is a magnetron cathode body including as a base material, a metal of a high melting point having an electron emission material inside and coated by borax of rare earth. The electron emission material and the metal of a high melting point are preferably La2O3 and W, respectively. The borax of rare earth is preferably LaB6.
Inventors:
OHMI, Tadahiro (1-1 Katahira 2-chome, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
大見 忠弘 (〒77 宮城県仙台市青葉区片平二丁目１番１号 国立大学法人東北大学内 Miyagi, 〒9808577, JP)
大見 忠弘 (〒77 宮城県仙台市青葉区片平二丁目１番１号 国立大学法人東北大学内 Miyagi, 〒9808577, JP)
Application Number:
JP2009/066220
Publication Date:
March 25, 2010
Filing Date:
September 17, 2009
Export Citation:
Assignee:
NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY (1-1 Katahira 2-chome, Aoba-ku Sendai-sh, Miyagi 77, 〒9808577, JP)
国立大学法人東北大学 (〒77 宮城県仙台市青葉区片平二丁目１番１号 Miyagi, 〒9808577, JP)
OHMI, Tadahiro (1-1 Katahira 2-chome, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
国立大学法人東北大学 (〒77 宮城県仙台市青葉区片平二丁目１番１号 Miyagi, 〒9808577, JP)
OHMI, Tadahiro (1-1 Katahira 2-chome, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
International Classes:
H01J23/04; H01J1/14; H01J9/04; H01J23/00
Attorney, Agent or Firm:
IKEDA, Noriyasu et al. (Hibiya Daibiru Bldg, 2-2 Uchisaiwaicho 1-chome, Chiyoda-k, Tokyo 11, 〒1000011, JP)