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Title:
MANGANESE OXIDE THIN FILM AND OXIDE LAMINATE
Document Type and Number:
WIPO Patent Application WO/2013/108508
Kind Code:
A1
Abstract:
Provided is a thin film or a laminate that undergoes phase transition due to a Mott transition at room temperature, achieving a switching function. In a certain embodiment of the present invention, a manganese oxide thin film (2), which is formed on a surface of a substrate (1) and has a composition represented by the compositional formula, RMnO3 (where R is at least one type of trivalent rare earth element selected from the lanthanide series), is provided, said manganese oxide thin film having an atomic layer containing an R element but not containing manganese (Mn), and an atomic layer containing Mn but not an R element, which are laminated in such a manner as to be alternately lined up in a direction perpendicular to the substrate surface, and having two crystal axes that are not equivalent to each other in the in-plane direction of the substrate surface. In a certain embodiment of the present invention, an oxide laminate is also provided, said oxide laminate having strongly-correlated oxide thin films (3, 31, 32) formed in contact with each other on the manganese oxide thin film (2) of the abovementioned form.

Inventors:
OGIMOTO YASUSHI (JP)
Application Number:
JP2012/081760
Publication Date:
July 25, 2013
Filing Date:
December 07, 2012
Export Citation:
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Assignee:
FUJI ELECTRIC CO., LTD. (1-1 Tanabeshinden, Kawasaki-ku Kawasaki-sh, Kanagawa 30, 〒2109530, JP)
International Classes:
C30B29/22; C01G45/00; C23C14/06; C23C14/08; C30B29/68; H01L27/105; H01L43/08; H01L45/00; H01L49/00
Foreign References:
JP2005213078A2005-08-11
JPH0963991A1997-03-07
JPH08102528A1996-04-16
Other References:
YASUSHI OGIMOTO ET AL.: "Koshisumen Kibanjo eno Mn Sankabutsu Hakumaku no Epitaxial Seicho", EXTENDED ABSTRACTS, JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES, vol. 58, March 2011 (2011-03-01)
YASUSHI OGIMOTO ET AL.: "Koshisumen Kibanjo ni Sakusei shita Mn Sankabutsu Hakumaku no Jiki Yuso Tokusei", EXTENDED ABSTRACTS, JAPAN SOCIETY OF APPLIED PHYSICS AND RELATED SOCIETIES, vol. 58, March 2011 (2011-03-01)
YASUSHI OGIMOTO ET AL.: "Interface-mediated phase control in ultrathin double-layer structures of perovskite manganites", ABSTRACTS OF THE MEETING OF THE PHYSICAL SOCIETY OF JAPAN, vol. 65, no. L, 1 March 2010 (2010-03-01), pages 663, XP008171591
Attorney, Agent or Firm:
KOUNO, Hiroaki (Suehiro-center Bldg. 7F, 4-8 Yorikimachi, Kita-ku, Osaka-sh, Osaka 36, 〒5300036, JP)
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Claims: