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Title:
MANIFOLD SYSTEM OF REMOVABLE COMPONENTS FOR DISTRIBUTION OF FLUIDS
Document Type and Number:
WIPO Patent Application WO2000003169
Kind Code:
A3
Abstract:
A manifold system for enabling a distribution of fluids includes a plurality of individual manifold blocks (4) that can be joined together to form a gas stick. Each manifold block will have a fluid passage way with an entrance port (6) and exit port (8) accessing a common surface (38). An active component can be mounted to one manifold block, while extending across a port of an adjacent manifold block. An alignment system can be provided to ensure that the entrance and exit ports are positioned in a plane containing the common surface to facilitate sealing.

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Inventors:
VU KIM N (US)
REDEMANN ERIC J (US)
SHERIFF DAVID P (US)
Application Number:
US9915272W
Publication Date:
July 05, 2001
Filing Date:
July 07, 1999
Export Citation:
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Assignee:
UNITED STATES FILTER CORP (US)
VU KIM N (US)
REDEMANN ERIC J (US)
SHERIFF DAVID P (US)
International Classes:
C23C16/44; F16K11/22; F16K27/00; F16L39/00; H01J37/32; H01L21/00; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): F16K27/00
Domestic Patent References:
WO1998025058A11998-06-11
Foreign References:
EP0845623A11998-06-03
US4080752A1978-03-28
FR2250907A11975-06-06
US5460204A1995-10-24
US5178191A1993-01-12
US4168724A1979-09-25
US4524807A1985-06-25
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