Title:
MANUFACTURING EQUIPMENT DIAGNOSIS SUPPORT SYSTEM
Document Type and Number:
WIPO Patent Application WO/2015/177870
Kind Code:
A1
Abstract:
A manufacturing equipment diagnosis support system according to the present invention is equipped with: a data collection device for collecting and recording respective data on multiple constituent devices to be monitored of the manufacturing equipment; a data analysis device for analyzing the recorded data; and a display device for displaying analysis processes and analysis results. The data analysis device is equipped with: a data analysis range setting unit for setting a data analysis range in the forms of data items and time; a data grouping unit for grouping the data through classification based on the specifications and use conditions of the devices to be monitored and classification based on physical quantities indicated by the data; a feature quantity extraction unit for extracting feature quantities in respective data items; an abnormal event identification unit for identifying an abnormal event candidate item indicating a different item from the others; and an examination unit for examining whether or not there is any significant difference between the abnormal event candidate item and the other data items.
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Inventors:
IMANARI HIROYUKI (JP)
OHARA KAZUHIRO (JP)
OHARA KAZUHIRO (JP)
Application Number:
PCT/JP2014/063359
Publication Date:
November 26, 2015
Filing Date:
May 20, 2014
Export Citation:
Assignee:
TOSHIBA MITSUBISHI ELEC INC (JP)
International Classes:
G05B23/02
Foreign References:
| JP2013137797A | 2013-07-11 | |||
| JP2011243118A | 2011-12-01 | |||
| JPH11344589A | 1999-12-14 |
Attorney, Agent or Firm:
TAKADA, Mamoru et al. (JP)
Takada 守 (JP)
Takada 守 (JP)
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