Title:
MANUFACTURING METHOD FOR DEPOSITION MASK, METAL SHEET USED FOR PRODUCING DEPOSITION MASK, AND MANUFACTURING METHOD FOR SAID METAL SHEET
Document Type and Number:
WIPO Patent Application WO/2016/129533
Kind Code:
A1
Abstract:
The present invention provides a metal sheet, on a first surface of which a resist pattern having a narrow width can be stably provided. This manufacturing method for a metal sheet includes a preparation step for preparing a sheet material comprising an iron alloy that contains nickel. When a composition analysis of the first surface of the metal sheet obtained from the sheet material is performed using X-ray photoelectron spectroscopy, the resulting ratio A1/A2 does not exceed 0.4, where A1 is the sum of the peak area value of nickel oxide and the peak area value of nickel hydroxide, and A2 is the sum of the peak area value of iron oxide and the peak area value of iron hydroxide.
Inventors:
IKENAGA CHIKAO (JP)
NAKAYAMA HIROAKI (JP)
IKEDA KAZUNARI (JP)
HATSUTA CHIAKI (JP)
OOUCHI UTAKO (JP)
NAKAYAMA HIROAKI (JP)
IKEDA KAZUNARI (JP)
HATSUTA CHIAKI (JP)
OOUCHI UTAKO (JP)
Application Number:
PCT/JP2016/053580
Publication Date:
August 18, 2016
Filing Date:
February 05, 2016
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
C23C14/04; C23F1/00; H01L51/50; H05B33/10
Foreign References:
| JP2000256800A | 2000-09-19 | |||
| JP2014065928A | 2014-04-17 | |||
| JP2012111195A | 2012-06-14 | |||
| JP5516816B1 | 2014-06-11 | |||
| JP5626491B1 | 2014-11-19 | |||
| JP5641462B1 | 2014-12-17 |
Other References:
See also references of EP 3257964A4
Attorney, Agent or Firm:
NAGAI Hiroshi et al. (JP)
Hiroyuki Nagai (JP)
Hiroyuki Nagai (JP)
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