Title:
MANUFACTURING METHOD AND DEVICE FOR TRANSPARENT CONDUCTIVE FILM, SPUTTERING TARGET AND TRANSPARENT CONDUCTIVE FILM
Document Type and Number:
WIPO Patent Application WO/2011/061922
Kind Code:
A1
Abstract:
Disclosed is a transparent conductive film manufacturing method which enables the formation of a transparent conductive film having excellent etching properties and conductivity, without using water vapour. The disclosed manufacturing method for a transparent conductive film comprises a step wherein an indium tin oxide thin film is formed on a substrate by sputtering a target material containing a first component which is formed from indium oxide, a second component which is formed from tin oxide, and a third component which is formed from at least one element, or the oxide thereof, selected from among La, Nd, Dy, Eu, Gd, Tb, Zr, Al, Si, Ti, and B. The method further comprises a step wherein the indium tin oxide thin film is patterned using an etching solution, and a step wherein the indium tin oxide thin film is crystalised by means of heat treatment. Due to the above method the ITO film can be etched by a weak acid immediately after film formation and a desired conductivity can be imparted to the ITO film.
Inventors:
YUKAWA, Tomiyuki (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
湯川 富之 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
TAKEI, Masaki (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
武井 応樹 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
KOBAYASHI, Motoshi (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
小林 大士 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
AKAMATSU, Yasuhiko (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
湯川 富之 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
TAKEI, Masaki (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
武井 応樹 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
KOBAYASHI, Motoshi (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
小林 大士 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
AKAMATSU, Yasuhiko (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
Application Number:
JP2010/006713
Publication Date:
May 26, 2011
Filing Date:
November 16, 2010
Export Citation:
Assignee:
ULVAC, INC. (2500 Hagisono, Chigasaki-shi Kanagawa, 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
YUKAWA, Tomiyuki (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
湯川 富之 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
TAKEI, Masaki (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
武井 応樹 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
KOBAYASHI, Motoshi (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
小林 大士 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００番地 Kanagawa, 〒2538543, JP)
YUKAWA, Tomiyuki (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
湯川 富之 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
TAKEI, Masaki (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
武井 応樹 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
KOBAYASHI, Motoshi (INC. Chiba Institute for Super Materials, 523 Yokota, Sammu-sh, Chiba 26, 〒2891226, JP)
小林 大士 (〒26 千葉県山武市横田５２３株式会社アルバック 千葉超材料研究所内 Chiba, 〒2891226, JP)
International Classes:
C23C14/08; H01B5/14; H01B13/00
Attorney, Agent or Firm:
OMORI, Junichi (2nd Floor U&M Akasaka Bldg, 7-5-47 Akasaka Minato-k, Tokyo 52, 〒1070052, JP)
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