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Title:
MANUFACTURING METHOD FOR DIELECTRIC MULTILAYER FILM-EQUIPPED GLASS PLATE, AND DIELECTRIC MULTILAYER FILM-EQUIPPED GLASS PLATE
Document Type and Number:
WIPO Patent Application WO/2018/043041
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a manufacturing method for a dielectric multilayer film-equipped glass plate having excellent scratch resistance. Provided is a manufacturing method for a dielectric multilayer film-equipped glass plate 1 comprising a glass plate 2 and a dielectric multilayer film 3 laminated on the glass plate 2. The dielectric multilayer film 3 has a first film 4 made of silicon oxide and a second film 5 made of a material with a higher refractive index than silicon oxide. The manufacturing method is characterized by comprising a step for preparing the glass plate 2, and a step for depositing the dielectric multilayer film 3 on the glass plate 2 by sputtering, and is characterized in that, when depositing the first film 4 by sputtering, the deposition pressure for the first film 4 is 0.4Pa or lower.

Inventors:
SAHARA, Keiichi (7-1, Seiran 2-chome, Otsu-sh, Shiga 39, 〒5208639, JP)
IMAMURA, Tsutomu (7-1, Seiran 2-chome, Otsu-sh, Shiga 39, 〒5208639, JP)
TANABE, Yasutaka (7-1, Seiran 2-chome, Otsu-sh, Shiga 39, 〒5208639, JP)
Application Number:
JP2017/028528
Publication Date:
March 08, 2018
Filing Date:
August 07, 2017
Export Citation:
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Assignee:
NIPPON ELECTRIC GLASS CO., LTD. (7-1 Seiran 2-chome, Otsu-shi Shiga, 39, 〒5208639, JP)
International Classes:
C03C17/34; B32B9/00; C23C14/08; G02B1/115; G02B5/26; G02B5/28
Foreign References:
JP2015063427A2015-04-09
JP2014032215A2014-02-20
JP2009007600A2009-01-15
JP2007508933A2007-04-12
JP2010222709A2010-10-07
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (Chuo Odori FN Bldg, 3-8 Tokiwamachi 1-chome, Chuo-ku, Osaka-sh, Osaka 28, 〒5400028, JP)
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