Title:
MANUFACTURING METHOD FOR DISPLAY PANEL
Document Type and Number:
WIPO Patent Application WO/2020/093475
Kind Code:
A1
Abstract:
A manufacturing method for a display panel. A titanium layer (251) is provided on a semiconductor oxide layer (24) to serve as an etch stop layer; and after the etching, oxygen ions (261) are doped into the titanium layer (251) by means of ion implantation, so that an electrically insulating titanium dioxide layer (28) is formed by the titanium layer (251) located on the semiconductor oxide layer (24), so as to form a plurality of thin film transistors (26).
Inventors:
HU XIAOBO (CN)
Application Number:
PCT/CN2018/117731
Publication Date:
May 14, 2020
Filing Date:
November 27, 2018
Export Citation:
Assignee:
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECH CO LTD (CN)
International Classes:
H01L27/32
Foreign References:
| CN102709329A | 2012-10-03 | |||
| CN107275350A | 2017-10-20 | |||
| CN103050441A | 2013-04-17 | |||
| US20060180816A1 | 2006-08-17 | |||
| US9397124B2 | 2016-07-19 |
Attorney, Agent or Firm:
ESSEN PATENT & TRADEMARK AGENCY (CN)
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