MANUFACTURING METHOD OF ELECTRODE PATTERN, THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, AND DISPLAY PANEL

WIPO Patent Application WO/2018/223879

A1

Provided in an embodiment of the present invention are a manufacturing method of an electrode pattern, a thin film transistor and a manufacturing method thereof, and a display panel. The manufacturing method of an electrode pattern comprises: forming a metal thin film; performing processing on the metal thin film to form a partner layer over a surface of the metal thin film, the partner layer being configured to react with a photoresist to form a hydrogen bond; and performing patterning to form an electrode. When patterning is performed on a metal thin film over which a partner layer is formed, a hydrogen bond formed as a result of reaction between the partner layer and a photoresist effectively enhances adhesive strength between the photoresist and a metal, such that the photoresist does not separate easily in a process of etching the metal, thereby realizing widespread use of thin film transistors.

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LI HAIXU (CN)
CAO ZHANFENG (CN)
YAO QI (CN)
WANG JIANGUO (CN)
MENG FANNA (CN)

PCT/CN2018/089111

December 13, 2018

May 31, 2018

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BOE TECHNOLOGY GROUP CO LTD (CN)

H01L21/3213; H01L29/786

CN107204289A	2017-09-26
CN105789218A	2016-07-20
CN105807563A	2016-07-27

LIU, SHEN & ASSOCIATES (CN)

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