Title:
MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATION ELEMENT AND MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATOR
Document Type and Number:
WIPO Patent Application WO/2019/059247
Kind Code:
A1
Abstract:
This manufacturing method of a piezoelectric vibration element 10 includes: preparing a piezoelectric substrate 11; providing a first electrode layer 60a on a first main surface 12a of the piezoelectric substrate 11; disposing a mask 70a on the side of the first main surface 12a of the piezoelectric substrate 11; and irradiating a radiation beam 90a through the mask 70a from the side of the first main surface 12a of the piezoelectric substrate 11, wherein a peripheral region 74a of the mask 70a is configured such that the amount of a radiation beam passing therethrough is greater than the amount of a radiation beam passing through a central region 72a, and irradiating the radiation beam 90a from the side of the first main surface 12a includes irradiating the radiation beam 90a to remove a portion of the first electrode layer 60a such that the first excitation electrode 14a having a small thickness from the central region 72a of the mask 70a to the peripheral region 74a is formed on the first main surface 12a of the piezoelectric substrate 11.
Inventors:
YAMAMOTO HIROYUKI (JP)
Application Number:
PCT/JP2018/034711
Publication Date:
March 28, 2019
Filing Date:
September 20, 2018
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H3/02; H03H3/04; H03H9/19
Foreign References:
| JPH10308645A | 1998-11-17 | |||
| JP2005159717A | 2005-06-16 | |||
| JP2009044237A | 2009-02-26 | |||
| JP2015109633A | 2015-06-11 | |||
| JP2017157934A | 2017-09-07 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
Download PDF:
Previous Patent: COMPOSITION FOR PREVENTING OR AMELIORATING HAND-FOOT SYNDROME
Next Patent: SINTERED OIL-RETAINING BEARING
Next Patent: SINTERED OIL-RETAINING BEARING