MANUFACTURING METHOD FOR POLISHING HEAD, POLISHING HEAD, AND POLISHING APPARATUS

WIPO Patent Application WO/2016/166928

A1

The present invention is a manufacturing method for a polishing head, the manufacturing method comprising: forming a groove in a lower end surface of an intermediate plate, the groove extending from an injection port for an incompressible fluid to an outer peripheral portion of the intermediate plate, and a groove extending from an exhaust port for air to the outer periphery of the intermediate plate; forming a cavity portion by affixing an elastic film to a lower end surface of a rigid ring and by joining an upper end surface of the rigid ring with the lower end surface of the intermediate plate, following which, the inside of the cavity portion is depressurized; and, after the depressurization step, enclosing the incompressible fluid in the cavity portion by evacuating air inside the cavity portion from the exhaust port and by closing the injection port and the exhaust port while injecting the incompressible fluid into the cavity portion from the injection port. This provides a manufacturing method of a polishing head wherein the workability is good, wherein control of the amount of the incompressible fluid is easy, and wherein it is possible to reduce the amount of air remaining in the cavity portion when a polishing head having the incompressible fluid enclosed in the cavity portion is manufactured.

OSEKI MASAAKI (JP)
SATO MICHITO (JP)

PCT/JP2016/001148

October 20, 2016

March 03, 2016

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SHINETSU HANDOTAI KK (JP)

B24B37/30; B24B41/06; H01L21/304

WO2013001719A1

2013-01-03

JP2013166200A	2013-08-29
JPS6352967A	1988-03-07

YOSHIMIYA, Mikio et al. (JP)
Good Miya Mikio (JP)

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