Title:
MANUFACTURING METHOD FOR POLYCRYSTALLINE SILICON INGOT, AND POLYCRYSTALLINE SILICON INGOT
Document Type and Number:
WIPO Patent Application WO/2011/118773
Kind Code:
A1
Abstract:
In a manufacturing method for a polycrystalline silicon ingot, a silicon melt is unidirectionally solidified in an upward direction from the bottom of a crucible. Silica is disposed in the bottom of a crucible, and using the bottom of the crucible as a base, the solidification process which occurs in the crucible is classified in three regions: a first region from 0 mm to height X (10 mm≤X<30 mm); a second region from height X to height Y (30 mm≤Y<100 mm); and a third region from at least height Y. The solidification rate (V1) in the first region is set in the range 10 mm/h≤V1≤20 mm/h, and the solidification rate (V2) in the second region is set in the range 1 mm/h≤V2≤ 5mm/h. Disclosed are a manufacturing method for a polycrystalline silicon ingot, and a polycrystalline silicon ingot in which many crystals in the (001), (111) orientation are present, in the base of which few parts have a high oxygen concentration, and which can significantly improve the production yield of polycrystalline silicon as a product.
Inventors:
TSUZUKIHASHI Koji (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
続橋 浩司 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
IKEDA Hiroshi (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
池田 洋 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
続橋 浩司 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
IKEDA Hiroshi (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
池田 洋 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
Application Number:
JP2011/057361
Publication Date:
September 29, 2011
Filing Date:
March 25, 2011
Export Citation:
Assignee:
MITSUBISHI MATERIALS CORPORATION (3-2 Otemachi 1-chome, Chiyoda-ku Tokyo, 17, 〒1008117, JP)
三菱マテリアル株式会社 (〒17 東京都千代田区大手町一丁目３番２号 Tokyo, 〒1008117, JP)
Mitsubishi Materials Electronic Chemicals Co., Ltd. (1-6 Barajima 3-chome, Akita-shi Akita, 85, 〒0108585, JP)
三菱マテリアル電子化成株式会社 (〒85 秋田県秋田市茨島三丁目１番６号 Akita, 〒0108585, JP)
TSUZUKIHASHI Koji (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
続橋 浩司 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
三菱マテリアル株式会社 (〒17 東京都千代田区大手町一丁目３番２号 Tokyo, 〒1008117, JP)
Mitsubishi Materials Electronic Chemicals Co., Ltd. (1-6 Barajima 3-chome, Akita-shi Akita, 85, 〒0108585, JP)
三菱マテリアル電子化成株式会社 (〒85 秋田県秋田市茨島三丁目１番６号 Akita, 〒0108585, JP)
TSUZUKIHASHI Koji (1-6, Barajima 3-chome, Akita-sh, Akita 85, 〒0108585, JP)
続橋 浩司 (〒85 秋田県秋田市茨島三丁目１番６号 三菱マテリアル電子化成株式会社内 Akita, 〒0108585, JP)
International Classes:
C01B33/02; B22D27/04; C30B29/06
Attorney, Agent or Firm:
SHIGA Masatake et al. (1-9-2, Marunouchi Chiyoda-k, Tokyo 20, 〒1006620, JP)
Claims: