Title:
MANUFACTURING METHOD OF THERMOELECTRIC CONVERSION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2020/045377
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a manufacturing method of a thermoelectric conversion element which has a thermoelectric element layer with excellent shape control properties and which enables a high level of integration; this manufacturing method is of a thermoelectric conversion element containing thermoelectric element layers (4a, 4b) formed from a thermoelectric semiconductor composition containing a thermoelectric semiconductor material on a substrate (1), and comprising a step in which a pattern frame (2) having openings (3) is provided on the substrate, a step in which the openings are filled with the thermoelectric semiconductor composition, a step in which the thermoelectric semiconductor composition filled into the openings is dried and a thermoelectric element layer is formed, and a step in which the pattern frame is separated from the substrate.
Inventors:
MORITA WATARU (JP)
KATO KUNIHISA (JP)
MUTO TSUYOSHI (JP)
KATSUTA YUMA (JP)
KATO KUNIHISA (JP)
MUTO TSUYOSHI (JP)
KATSUTA YUMA (JP)
Application Number:
PCT/JP2019/033406
Publication Date:
March 05, 2020
Filing Date:
August 27, 2019
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H01L35/34; H01L35/08; H01L35/32
Foreign References:
| US20030041892A1 | 2003-03-06 | |||
| JP2013251333A | 2013-12-12 | |||
| JP2017041540A | 2017-02-23 |
Attorney, Agent or Firm:
OHTANI PATENT OFFICE (JP)
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