Title:
MANUFACTURING PROCESS OF ACOUSTIC RESONATOR, AND ACOUSTIC RESONATOR
Document Type and Number:
WIPO Patent Application WO/2022/032699
Kind Code:
A1
Abstract:
Disclosed are a manufacturing process of an acoustic resonator, and an acoustic resonator. The acoustic resonator comprises a substrate, an acoustic mirror, and a resonant thin film layer composed of a bottom electrode layer, a piezoelectric layer and a top electrode layer, wherein a region where the resonant thin film layer overlaps with the acoustic mirror in a thickness direction of the substrate is a projection region; and there is an amorphous portion in the resonant thin film layer, with one side of the amorphous portion being located within the projection region or coinciding with the boundary of the projection region, and the other side of the amorphous portion being located outside the projection region. In a preferred embodiment, the acoustic mirror comprises a cavity or a Bragg reflective layer. The amorphous portion can greatly suppress the parasitic oscillation of the resonator caused by the outward connection of the top electrode layer. In the region where the amorphous portion is located, an electrode layer can be directly subjected to wiring, thereby avoiding parasitic and resonant interference generated by the bottom electrode layer, the top electrode layer and the piezoelectric layer outside of an effective resonant region, and reducing process costs and wiring design difficulties.
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Inventors:
LI LINPING (CN)
SHENG JINGHAO (CN)
JIANG ZHOU (CN)
SHENG JINGHAO (CN)
JIANG ZHOU (CN)
Application Number:
PCT/CN2020/109856
Publication Date:
February 17, 2022
Filing Date:
August 18, 2020
Export Citation:
Assignee:
HANGZHOU XINGHE TECH CO LTD (CN)
International Classes:
H03H3/02; H03H9/17; H03H9/02
Foreign References:
| CN110120793A | 2019-08-13 | |||
| CN101022271A | 2007-08-22 | |||
| CN111193485A | 2020-05-22 |
Attorney, Agent or Firm:
XIAMEN FEBE INTELLECTUAL PROPERTY AGENCY GP (CN)
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