MARANGONI DRYING DEVICE WITH ADJUSTABLE SPRAY ANGLE

WIPO Patent Application WO/2022/007539

A1

A Marangoni drying device with an adjustable spray angle, comprising: a driving mechanism for vertically rotating a wafer, a supply arm for transferring a fluid, and a box, wherein the supply arm can vertically swing and supplies a fluid to the wafer by means of a nozzle assembly arranged at a free end of the supply arm; the nozzle assembly comprises a first nozzle arm and a second nozzle arm which are provided with nozzles; the first nozzle arm and the second nozzle arm extend along the supply arm and are rotatably and fixedly arranged at the free end of the supply arm; the first nozzle arm is located below the second nozzle arm; the first nozzle arm is provided with one nozzle, and the second nozzle arm is provided with two nozzles; and the nozzle of the first nozzle arm is perpendicular to the axis of the first nozzle arm, and the nozzle of the second nozzle arm is obliquely arranged on the second nozzle arm in a back hooking or forward leaning manner.

JPH11128325	CLEANING PROCESS MONITOR
WO/2019/205096	CLEANING AND DRYING DEVICE FOR PLUSH TOYS

LI CHANGKUN (CN)
ZHAO DEWEN (CN)
CAO ZILI (CN)
LU XINCHUN (CN)

PCT/CN2021/097223

January 13, 2022

May 31, 2021

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UNIV TSINGHUA (CN)
HWATSING TECH CO LTD (CN)

B08B3/00; H01L21/67; F26B11/18; F26B21/00

CN111536783A	2020-08-14
CN111540702A	2020-08-14
CN212257357U	2020-12-29
CN212257356U	2020-12-29
US10008380B2	2018-06-26
CN105655232A	2016-06-08
CN108649006A	2018-10-12
CN109378289A	2019-02-22
JP2000262988A	2000-09-26
JP2004111857A	2004-04-08
US20140248782A1	2014-09-04

HWATSING TECHNOLOGY CO., LTD. (CN)

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