Title:
MARKING DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/006587
Kind Code:
A1
Abstract:
The present invention comprises: a workpiece holding and transporting part (2); a first marking unit (3A); a second marking unit (3B); a pre-marking-pattern imaging unit (4) that captures an image of a of a first pre-marking pattern (PM1) that is marked using the first marking unit (3A) upon a first pre-marking area (PR1) that is set on a marking target object and of a second pre-marking pattern (PM2) that is marked using the second marking unit (3B) upon a second pre-marking area (PR2) that is set on the marking target object; a pre-marking position detecting part (5) that detects the marking position of the first pre-marking pattern (PM1) and the second pre-marking pattern (PM2); a pre-marking reference position registration part (6); a first marking position deviation correction part (7A); and a second marking position deviation correction part (7B). As a result, even if the processing range that is set for an object to be processed is large, the present invention is capable of performing high-resolution patterning in a short period of time and prevents the occurrence of positioning deviations and poor overlap.
Inventors:
OKABE HITOSHI (JP)
TAO MASANORI (JP)
TANIKAWA HIROKI (JP)
TSUNEYOSHI TAKESHI (JP)
YAMAZAKI NOBUHIRO (JP)
TAO MASANORI (JP)
TANIKAWA HIROKI (JP)
TSUNEYOSHI TAKESHI (JP)
YAMAZAKI NOBUHIRO (JP)
Application Number:
PCT/JP2015/069470
Publication Date:
January 14, 2016
Filing Date:
July 07, 2015
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
B23K26/00; B05C5/00; B23K26/03; B23K26/042; B41J2/475; G03F7/20; H01L21/02
Foreign References:
| JP2012245791A | 2012-12-13 | |||
| JPS5984515A | 1984-05-16 | |||
| JPH0793828A | 1995-04-07 | |||
| JP2007144400A | 2007-06-14 | |||
| JP2002316288A | 2002-10-29 | |||
| US20060023011A1 | 2006-02-02 |
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