Title:
MASK ADJUSTMENT UNIT, MASK DEVICE, AND DEVICE AND METHOD FOR MANUFACTURING MASK
Document Type and Number:
WIPO Patent Application WO/2013/150699
Kind Code:
A1
Abstract:
[Problem] To provide a feature such as a mask adjustment unit capable of appropriately adjusting the position of a mask pattern. [Solution] This mask adjustment unit is provided with a base body, a movable member, and an adjustment mechanism. The movable member supports the outer edge part-side of the main mask body having an outer edge part, and is provided to the base body so as to be capable of moving. The adjustment mechanism applies, through the movable member to the main mask body supported by the movable member, both a tensile force acting from the outer edge part of the main mask body towards the outside of the main mask body, and a pressing force acting from the outer edge part to the inside of the main mask body.
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Inventors:
KURIYAMA KENTARO (JP)
KUBO TOMOHIRO (JP)
KUBO TOMOHIRO (JP)
Application Number:
PCT/JP2013/000532
Publication Date:
October 10, 2013
Filing Date:
January 31, 2013
Export Citation:
Assignee:
SONY CORP (JP)
International Classes:
C23C14/04; H01L51/50; H05B33/10
Foreign References:
| JP2003068454A | 2003-03-07 | |||
| JPH0738231A | 1995-02-07 | |||
| JP2004247718A | 2004-09-02 | |||
| JP2003039633A | 2003-02-13 |
Attorney, Agent or Firm:
OMORI, JUNICHI (JP)
Omori Junichi (JP)
Omori Junichi (JP)
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