Title:
MASK BOX
Document Type and Number:
WIPO Patent Application WO/2018/095249
Kind Code:
A1
Abstract:
A mask box comprises a bottom plate (1), a middle frame (2) disposed above the bottom plate (1), and a top cover (3) disposed above the middle frame (2). The bottom plate (1), the middle frame (2) and the top cover (3) form, in a surrounding manner, an accommodating chamber having an opening. A door plate (4) is disposed at the opening. A plurality of mask supporting bases is disposed on the bottom plate (1), and gaps are formed between the mask supporting bases and the middle frame (2). A longitudinal section of the middle frame (2) is of an H structure. Gaps are formed among a rail (21) of an H structure, a bottom surface of a first vertical edge (22) located on an inner side and the bottom plate (1). By arranging gaps between the mask supporting bases and the middle frame (2), so that the box can be adapted to a mask fetch manner using vacuum adsorption type mask fork and a mask fetch manner using a physical clamping type mask fork; in addition, the longitudinal section of the middle frame (2) is set as an H structure, and gaps are formed among the rail (21) of an H structure, the lower surface of the first vertical edge (22) and the bottom plate (1), so that the box can be adapted to a mask fetch manner using a mask fork without mask protection and a mask fetch manner having mask protection, thereby greatly improving the compatibility.
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Inventors:
WANG GANG (CN)
ZHANG RONGJUN (CN)
HUANG DONGLIANG (CN)
ZHANG RONGJUN (CN)
HUANG DONGLIANG (CN)
Application Number:
PCT/CN2017/111018
Publication Date:
May 31, 2018
Filing Date:
November 15, 2017
Export Citation:
Assignee:
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD (CN)
International Classes:
G03F1/66
Foreign References:
| CN103984203A | 2014-08-13 | |||
| CN203133471U | 2013-08-14 | |||
| CN103105728A | 2013-05-15 | |||
| CN203720526U | 2014-07-16 | |||
| CN201327564Y | 2009-10-14 | |||
| JP2014027217A | 2014-02-06 |
Other References:
See also references of EP 3547025A4
Attorney, Agent or Firm:
SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY (CN)
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