Title:
MASK FOR DEPOSITION AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2019/098547
Kind Code:
A2
Abstract:
An embodiment relates to a method for manufacturing a deposition mask for depositing OLED pixels, comprising the steps of: preparing a metal plate; disposing a first photoresist layer on one surface of the metal plate and patterning the first photoresist layer by exposing and developing the first photoresist layer; forming a first groove on the one surface of the metal plate by half-etching the open portion of the patterned first photoresist layer; disposing a second photoresist layer on the other surface opposite to the one surface of the metal plate, and patterning the second photoresist layer by exposing and developing the second photoresist layer; forming a through hole connected to the first groove by half-etching the open portion of the patterned second photoresist layer; and forming a mask pattern on the metal plate by removing the first photoresist layer and the second photoresist layer, wherein the metal plate has a straightness value expressed by following equation 1, the straightness of the metal plate being 0.006% or less.
Inventors:
LEE SANG YU (KR)
JO YEONG DEUK (KR)
KIM NAM HO (KR)
JO YEONG DEUK (KR)
KIM NAM HO (KR)
Application Number:
PCT/KR2018/012484
Publication Date:
May 23, 2019
Filing Date:
October 22, 2018
Export Citation:
Assignee:
LG INNOTEK CO LTD (KR)
International Classes:
H01L51/56; G03F7/20; H01L21/02; H01L51/00
Attorney, Agent or Firm:
HAW, Yong Noke (KR)
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