Title:
MASK HOLDING MECHANISM
Document Type and Number:
WIPO Patent Application WO/2011/055826
Kind Code:
A1
Abstract:
Disclosed is a mask holding mechanism, wherein a mask holding section that holds a mask can be driven in the X, Y, Z, and θ directions by means of an integrated mechanism, the size and the weight of the drive mechanism for the mask holding section are reduced, and response is improved.
The mask holding mechanism is provided with: a pair of first drive mechanisms (11), each of which has a first drive section (20) that can drive the mask holding section (16) in the X direction and the Z direction, and a first guide section (23) that can guide the mask holding section (16) in the Y direction; and a second drive mechanism (12), which has a second drive section (50) that can drive the mask holding section (16) in the Y direction and the Z direction, and a second guide section (53) that can guide the mask holding section (16) in the X direction. The mask holding section (16) is supported such that the mask holding section can be driven in the X, Y, and θ directions with a tilt.
Inventors:
TOGAWA SATORU
Application Number:
PCT/JP2010/069865
Publication Date:
May 12, 2011
Filing Date:
November 08, 2010
Export Citation:
Assignee:
NSK LTD (JP)
TOGAWA SATORU
TOGAWA SATORU
International Classes:
G03F7/20; G03F9/00
Domestic Patent References:
| WO1996024461A1 | 1996-08-15 |
Foreign References:
| JP2008251921A | 2008-10-16 | |||
| JP2003099987A | 2003-04-04 | |||
| JPH055345U | 1993-01-26 | |||
| JPH0536582A | 1993-02-12 | |||
| JPS63131208A | 1988-06-03 | |||
| JPS60108854A | 1985-06-14 |
Attorney, Agent or Firm:
OGURI Shohei et al. (JP)
Shohei Oguri (JP)
Shohei Oguri (JP)
Download PDF: