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Title:
MASK MANAGEMENT SYSTEM AND MASK USE METHOD
Document Type and Number:
WIPO Patent Application WO/2017/202134
Kind Code:
A1
Abstract:
A mask management system (1) and a mask use method. The mask management system (1), comprises: a mask feeding module (11) configured to provide at least one mask group (100), each mask group (100) comprising a cartridge (101) and a plurality of masks (102) placed in the cartridge (101); a mask detecting and processing module (12) configured to detect the plurality of masks (102) in the mask group (100) and perform, according to a detection result, corresponding masking processing on the masks (102) need to be processed; and a mask classification module (13) configured to readjust the processed and qualified masks (102) into the cartridge (101) of the mask group (100) to which the masks (102) belong. The mask management system (1) and the mask use method can perform refined management and control and are favorable for improving production efficiency.

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Inventors:
ZHANG XIAOHUA (CN)
LIU SHAOHUA (CN)
LIU ZHENYU (CN)
YAN DONG (CN)
CUI FUYI (CN)
Application Number:
PCT/CN2017/078428
Publication Date:
November 30, 2017
Filing Date:
March 28, 2017
Export Citation:
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Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
ORDOS YUANSHENG OPTOELECTRONICS CO LTD (CN)
International Classes:
G03F1/66
Foreign References:
CN103176371A2013-06-26
CN105974729A2016-09-28
CN1770016A2006-05-10
JPH0951028A1997-02-18
JPS59181550A1984-10-16
US20020094257A12002-07-18
Attorney, Agent or Firm:
LIU, SHEN & ASSOCIATES (CN)
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