Title:
MASK MANUFACTURING METHOD AND MASK
Document Type and Number:
WIPO Patent Application WO/2019/014947
Kind Code:
A1
Abstract:
A method for manufacturing a mask (100). The method comprises the following steps: forming a reinforcing layer (20) on a substrate (10); forming a conductive magnetic layer (30) on the reinforcing layer (20); subjecting the conductive magnetic layer (30) having the reinforcing layer (20) to first patterning processing, to obtain a patterned structural layer (22) formed on the substrate (10); and subjecting the substrate (10) having the patterned structural layer (22) to second patterning processing, to form the mask (100).
Inventors:
ZHAO XIAOHU (CN)
Application Number:
PCT/CN2017/093949
Publication Date:
January 24, 2019
Filing Date:
July 21, 2017
Export Citation:
Assignee:
SHENZHEN ROYOLE TECHNOLOGIES CO LTD (CN)
International Classes:
G03F1/38; C23C14/04
Foreign References:
| CN205687999U | 2016-11-16 | |||
| CN103205678A | 2013-07-17 | |||
| CN103205697A | 2013-07-17 | |||
| CN105720083A | 2016-06-29 | |||
| CN106847505A | 2017-06-13 | |||
| JP2003272838A | 2003-09-26 | |||
| JP2008255449A | 2008-10-23 |
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (CN)
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