Title:
MASK, METHOD FOR MANUFACTURING SAME, AND METHOD FOR MANUFACTURING ORGANIC LIGHT-EMITTING DIODE DISPLAY
Document Type and Number:
WIPO Patent Application WO/2018/086355
Kind Code:
A1
Abstract:
A mask, comprising a mask substrate (10) and multiple openings (101) running through the mask substrate (10). The mask is made of single-crystal silicon. Also disclosed are a method for manufacturing a mask, and a method for manufacturing an organic light-emitting diode display.
Inventors:
ZHANG CAN (CN)
CHEN XIAOCHUAN (CN)
CHEN XIAOCHUAN (CN)
Application Number:
PCT/CN2017/089949
Publication Date:
May 17, 2018
Filing Date:
June 26, 2017
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
International Classes:
C23C14/04; C23C14/24; H01L51/56
Foreign References:
| CN106435473A | 2017-02-22 | |||
| CN1633515A | 2005-06-29 | |||
| CN1367636A | 2002-09-04 | |||
| CN1578563A | 2005-02-09 | |||
| JP2004217963A | 2004-08-05 | |||
| JP2003007589A | 2003-01-10 | |||
| JP2003007590A | 2003-01-10 |
Attorney, Agent or Firm:
LIU, SHEN & ASSOCIATES (CN)
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