MASK PLATE AND EVAPORATION DEVICE - BOE TECHNOLOGY GROUP CO LTD

Title:

MASK PLATE AND EVAPORATION DEVICE

Document Type and Number:

WIPO Patent Application WO/2018/028183

Kind Code:

A1

Abstract:

Disclosed is a mask plate (100) and an evaporation device, wherein the mask plate (100) comprises a frame (101) and a first mask strip (1021) provided on an inner side of the frame (101), the frame (101) comprises an outer frame (1011) and an inner frame (1012), the outer frame (1011) is located on an outer side thereof and has a first plane (103), the inner frame (1012) is located on an inner side thereof and has a second plane (104), and the first plane (103) is higher than the second plane (104), thereby forming a step (105); and the first mask strip (1021) is fixed to the outer frame (1011) via two ends and extends along one side of the frame (101) in the outer frame (1011), and an orthographic projection of the first mask strip (1021) on the second plane (104) is at least partially overlapped with the inner frame (1012) at a side thereof. In the mask plate (100), with the design of changing the frame (101) and the mask strips (1021, 1022) being fixed on the frame, the problem of the scratching of a glass substrate is effectively solved, and the yield and the life-span of the subsequent product are effectively promoted.

Inventors:

XU PENG (CN)
QIAO YONGKANG (CN)
PAN SHENGKAI (CN)
LIU JIE (CN)

Application Number:

PCT/CN2017/075341

Publication Date:

February 15, 2018

Filing Date:

March 01, 2017

Export Citation:

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Assignee:

BOE TECHNOLOGY GROUP CO LTD (CN)
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO LTD (CN)

International Classes:

C23C14/04; C23C14/24

Foreign References:

CN205856592U	2017-01-04
CN103668051A	2014-03-26
CN103668053A	2014-03-26
US20120107506A1	2012-05-03

Other References: