Title:
MASK PLATE
Document Type and Number:
WIPO Patent Application WO/2016/065816
Kind Code:
A1
Abstract:
Disclosed is a mask plate (1). The mask plate (1) comprises a transparent substrate (8). The transparent substrate (8) is provided with a semi-transparent film layer (7) and a light blocking layer (9) to form a lightproof area A, a semi-transparent area B and a fully transparent area C. The transparent substrate (8) is also provided with a light extinction film layer (4) on the periphery of the fully transparent area C for reducing the intensity of ultraviolet light (3) transmitted through the periphery of the fully transparent area C. The size of a via hole formed by exposure of the mask plate is less affected by the thickness variation of a photoresist on the periphery of a via hole.
Inventors:
WANG DESHUAI (CN)
WANG LIANG (CN)
WANG LIANG (CN)
Application Number:
PCT/CN2015/074735
Publication Date:
May 06, 2016
Filing Date:
April 14, 2015
Export Citation:
Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
BEIJING BOE OPTOELECTRONICS (CN)
BEIJING BOE OPTOELECTRONICS (CN)
International Classes:
G03F1/54
Foreign References:
| CN1633625A | 2005-06-29 | |||
| CN104407496A | 2015-03-11 | |||
| CN100507713C | 2009-07-01 | |||
| CN1721988A | 2006-01-18 | |||
| JP2008026668A | 2008-02-07 |
Attorney, Agent or Firm:
CHINA PATENT AGENT (H.K.) LTD. (CN)
中国专利代理(香港)有限公司 (CN)
中国专利代理(香港)有限公司 (CN)
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