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Title:
MASK PLATE
Document Type and Number:
WIPO Patent Application WO/2021/223569
Kind Code:
A1
Abstract:
A mask plate relating to the technical field of display, comprising a first splicing exposure region (120) and a second splicing exposure region (220) which are arranged along a first direction (A). After being translated along a first vector (u1), the first splicing exposure region (120) can overlap with the second splicing exposure region (220). The mask plate comprises a first splicing light-shielding bar (121) provided in the first splicing exposure region (120) and a second splicing light-shielding bar (221) correspondingly provided in the second splicing exposure region (220). The first splicing light-shielding bar (121) runs through the first splicing exposure region (120) in the first direction (A); the second splicing light-shielding bar (221) runs through the second splicing exposure region (220) in the first direction (A); one of the first splicing light-shielding bar (121) and the corresponding second splicing light-shielding bar (221) has a width equal to a target width, and the other has a width greater than the target width; after a pattern of the first splicing light-shielding bar (121) is translated along the first vector (u1), a first auxiliary splicing pattern (1211) can be formed; the first auxiliary splicing pattern (1211) completely overlaps with the second splicing light-shielding bar (221). The uniformity of a display panel can be improved when splicing exposure is performed by using the mask plate.

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Inventors:
ZOU JIABIN (CN)
YIN XIAOFENG (CN)
TIAN CHUNGUANG (CN)
WEN NA (CN)
Application Number:
PCT/CN2021/086282
Publication Date:
November 11, 2021
Filing Date:
April 09, 2021
Export Citation:
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Assignee:
BOE TECHNOLOGY GROUP CO LTD (CN)
BEIJING BOE DISPLAY TECH CO (CN)
International Classes:
G03F1/38; G03F1/00
Domestic Patent References:
WO2004064126A12004-07-29
Foreign References:
CN111443566A2020-07-24
CN102819183A2012-12-12
CN111025842A2020-04-17
CN110333642A2019-10-15
CN108761995A2018-11-06
JP2004071767A2004-03-04
Attorney, Agent or Firm:
BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD. (CN)
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