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Title:
MASK AND PREPARATION METHOD THEREFOR, FILM PREPARATION METHOD, AND PACKAGE STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2019/134444
Kind Code:
A1
Abstract:
Provided is a mask. The mask is divided into at least a transmitting region and a shielding region. The mask comprises a substrate and a protrusion provided on the substrate and located at the edge of the shielding region adjacent to the transmitting region. The protrusion protrudes toward a direction away from the substrate, and the thickness of the protrusion in a direction perpendicular to the plane on which the substrate is located gradually decreases along a direction from the transmitting region to the shielding region. The mask of the present invention can prevent vapor deposition and breakage objects from falling off, reduce the deposition shadow, and further extend the service time of the mask, thus improving the productivity and reducing costs.

Inventors:
ZHOU, Da (No.9 Dize Rd, BDA, Beijing 6, 100176, CN)
JIANG, Zhiliang (No.9 Dize Rd, BDA, Beijing 6, 100176, CN)
MO, Zailong (No.9 Dize Rd, BDA, Beijing 6, 100176, CN)
LV, Xuefeng (No.9 Dize Rd, BDA, Beijing 6, 100176, CN)
Application Number:
CN2018/115159
Publication Date:
July 11, 2019
Filing Date:
November 13, 2018
Export Citation:
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Assignee:
BOE TECHNOLOGY GROUP CO., LTD. (No.10 Jiuxianqiao Rd, Chaoyang District, Beijing 5, 100015, CN)
CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. (No.1188, Hezuo Rd. , Hi-tech Development Zone, Chengdu Sichuan 1, 611731, CN)
International Classes:
H01L21/027; H01L21/033; H01L27/32; H01L51/00; H01L51/56
Foreign References:
CN102096316A2011-06-15
CN108172505A2018-06-15
US20100265207A12010-10-21
US20130277647A12013-10-24
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CHEN, Yuan10th Floor, Tower D, Minsheng Financial Center, 28 Jianguomennei Avenue, Dongcheng District, Beijing 5, 100005, CN)
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