Title:
MASKING JIG, SUBSTRATE HEATING APPARATUS, AND FILM FORMATION METHOD
Document Type and Number:
WIPO Patent Application WO/2011/141979
Kind Code:
A1
Abstract:
A cooler (30) is connected to the back surface (10b) of an insulating substrate (10). A masking jig (60) is used for defining the film formation area on which a coating film (41a) is to be formed when a copper powder (41) is sprayed onto the surface (10a) of the insulating substrate (10) by means of a cold spray apparatus (40) to form the coating film (41a). In the masking jig (60), an opening (63) for specifying the film formation area is formed, and a metal member (61) that contacts with the surface (10a) of the insulating substrate (10) is also formed. In the inside of the metal member (61), an electrically heating wire (70) that can heat an area adjacent to the opening (63) is provided. This constitution enables the cold spray apparatus (40) to spray the copper powder (41) onto the surface (10a) of the insulating substrate (10) while heating the surface (10a) of the insulating substrate (10) by an inexpensive structure, when the cooler (30) is connected previously to the back surface (10b) of the insulating substrate (10) that constitutes a power module.
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Inventors:
IKEJIRI Takashi (1 Toyota-cho, Toyota-sh, Aichi 71, 〒4718571, JP)
Application Number:
JP2010/057856
Publication Date:
November 17, 2011
Filing Date:
May 10, 2010
Export Citation:
Assignee:
TOYOTA JIDOSHA KABUSHIKI KAISHA (1 Toyota-cho, Toyota-shi Aichi, 71, 〒4718571, JP)
トヨタ自動車株式会社 (〒71 愛知県豊田市トヨタ町１番地 Aichi, 〒4718571, JP)
トヨタ自動車株式会社 (〒71 愛知県豊田市トヨタ町１番地 Aichi, 〒4718571, JP)
International Classes:
C23C24/04; B05B15/04; B05D1/32; C23C4/02; C23C4/12; H01L23/36
Attorney, Agent or Firm:
COSMOS PATENT OFFICE (Annex 2nd Floor, Nagoya Center Building 2-22, Nishiki 2-chome, Naka-ku, Nagoya-sh, Aichi 03, 〒4600003, JP)
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Claims: