Title:
MASS FLOW CONTROLLER AND FLOW CONTROL METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2022/247926
Kind Code:
A1
Abstract:
A mass flow controller comprising a control module (300), a fluid channel, a flow regulation valve (200), a flow sensor (400) arranged between an inlet and the flow regulation valve (200), and a pressure sensor (500) arranged at an outlet; the control module (300) is used for entering into a pressure feedback regulation mode when a change quantity of a target flow value exceeds a preset threshold, and is used for entering a flow feedback regulation mode when fluid flow measured by the flow sensor (400) satisfies a first stability condition; the control module (300) is used in the pressure feedback adjustment mode for calculating a degree of opening adjustment quantity for the flow regulation valve (200) according to a fluid pressure value and the target flow value, and adjusting the degree of opening of the flow regulation valve (200) according to the degree of opening adjustment quantity; and said module is used in the flow feedback regulation mode for calculating the degree of opening adjustment quantity for the flow regulation valve (200) according to a fluid flow value and the target flow value, and adjusting the degree of opening of the flow regulation valve (200) according to the degree of opening adjustment quantity. Rapid response is achieved while ensuring flow control precision
Inventors:
DENG BOWEN (CN)
MU CHANGHUA (CN)
ZOU YITAO (CN)
MU CHANGHUA (CN)
ZOU YITAO (CN)
Application Number:
PCT/CN2022/095493
Publication Date:
December 01, 2022
Filing Date:
May 27, 2022
Export Citation:
Assignee:
BEIJING SEVENSTAR FLOW CO LTD (CN)
International Classes:
G05D7/06
Foreign References:
| CN113311881A | 2021-08-27 | |||
| CN113485470A | 2021-10-08 | |||
| US5475614A | 1995-12-12 | |||
| CN108227763A | 2018-06-29 | |||
| CN112000160A | 2020-11-27 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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