Title:
MASS FLOW CONTROLLER SYSTEM
Document Type and Number:
WIPO Patent Application WO/2011/078242
Kind Code:
A1
Abstract:
Disclosed is a mass flow controller system which makes it possible to precisely control an output flow rate by means of a mass flow controller. In the mass flow controller system, data giving information about the relationship between flow rate values of a reference gas and CF values of a sample gas are stored; a target flow rate is converted into a reference gas flow rate using a predetermined CF value; a sample gas flow rate is calculated from the converted reference gas flow rate and the CF value corresponding to the reference gas flow rate; the sample gas flow rate is compared with the target flow rate; and the CF value used for the reference gas flow rate conversion or the sample gas flow rate calculation is updated using the corresponding relationship therebetween.
Inventors:
TAKEUCHI, Hiroyuki (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
竹内 洋之 (〒16 京都府京都市南区上鳥羽鉾立町１１番地５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
YONEDA, Yutaka (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
竹内 洋之 (〒16 京都府京都市南区上鳥羽鉾立町１１番地５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
YONEDA, Yutaka (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
Application Number:
JP2010/073172
Publication Date:
June 30, 2011
Filing Date:
December 22, 2010
Export Citation:
Assignee:
HORIBA STEC, Co., Ltd. (11-5, Hokodate-cho Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
株式会社堀場エステック (〒16 京都府京都市南区上鳥羽鉾立町１１番地５ Kyoto, 〒6018116, JP)
TAKEUCHI, Hiroyuki (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
竹内 洋之 (〒16 京都府京都市南区上鳥羽鉾立町１１番地５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
株式会社堀場エステック (〒16 京都府京都市南区上鳥羽鉾立町１１番地５ Kyoto, 〒6018116, JP)
TAKEUCHI, Hiroyuki (Co. Ltd., 11-5, Hokodate-cho, Kamitoba, Minami-ku, Kyoto-sh, Kyoto 16, 〒6018116, JP)
竹内 洋之 (〒16 京都府京都市南区上鳥羽鉾立町１１番地５ 株式会社堀場エステック内 Kyoto, 〒6018116, JP)
International Classes:
G05D7/06; G01F1/00
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (3F Karasumanijyo Bldg, 267 Makieya-cho, Nijyo-agaru, Karasuma-dori, Nakagyo-ku, Kyoto-cit, Kyoto 57, 〒6040857, JP)