Title:
MASS FLOW METER OR CONTROLLER WITH INCLINATION SENSOR
Document Type and Number:
WIPO Patent Application WO/2007/109177
Kind Code:
A3
Abstract:
A thermal mass flow meter associated with an inclination sensor that detects an angle of inclination of at least one portion of a thermal mass flow sensor relative to at least one reference axis. Based upon the detected angle of inclination, the output signal of the mass flow meter that is indicative of the mass flow rate of fluid through the sensor may be compensated to account for any inaccuracies relating to the orientation in which the mass flow meter is installed. Inaccuracies for which compensation may be provided include thermal siphoning effects and fluid buoyancy effects. By compensating for such inaccuracies, the mass flow meter may be used in any orientation, and/or may be used in non-inertial (e.g., accelerating) environments. The flow meter may be used as a stand alone device, or incorporated in a thermal mass flow controller.
Inventors:
WANG CHIUN (US)
REDEMANN ERIC J (US)
REDEMANN ERIC J (US)
Application Number:
PCT/US2007/006712
Publication Date:
June 23, 2011
Filing Date:
March 16, 2007
Export Citation:
Assignee:
CELERITY INC (US)
WANG CHIUN (US)
REDEMANN ERIC J (US)
WANG CHIUN (US)
REDEMANN ERIC J (US)
International Classes:
G01C9/00; G01F1/68; G01F25/00
Foreign References:
| US6668642B2 | 2003-12-30 | |||
| US20020046612A1 | 2002-04-25 | |||
| US20040149027A1 | 2004-08-05 |
Attorney, Agent or Firm:
SCHEINBERG, Michael, O. et al. (LLPPO Box 16414, Austin TX, US)
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