MASS SPECTROMETER AND MASS SPECTROMETRY METHOD

Title:

MASS SPECTROMETER AND MASS SPECTROMETRY METHOD

Document Type and Number:

WIPO Patent Application WO/2021/157175

Kind Code:

A1

Abstract:

In a mass spectrometer, due to impurities accumulated inside a frame, a withstand voltage may decrease, and electric discharge may occur in an ion source, thereby making it impossible to perform normal measurement. Since the result of abnormality measurement due to the electric discharge cannot be distinguished from measurement abnormality caused by clogging of a tube between a pretreatment part and a needle, there is a problem in that time is required to identify abnormal portions, and a maintenance property is lowered. As a means for solving the problem, the present invention comprises: a return current detection unit connected in series between a frame and an ion source power supply that applies a voltage to the needle; and a return current detection unit that is connected in series between the frame and a counter electrode power supply that applies a voltage to a counter electrode. By comparing a current measured by the return current detection unit with a predetermined threshold value, the occurrence of the electric discharge and the location where the electric discharge occurs are detected.

Inventors:

NISHIMOTO TAKUMA (JP)
ONG ZIHAO (JP)
FURUYA ISAO (JP)
TOUDA HIROSHI (JP)
HASHIMOTO YUICHIRO (JP)
SUGIYAMA MASUYUKI (JP)

Application Number:

PCT/JP2020/044929

Publication Date:

August 12, 2021

Filing Date:

December 02, 2020

Export Citation:

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Assignee:

HITACHI HIGH TECH CORP (JP)

International Classes:

G01N27/62; H01J49/10; H01J49/26

Domestic Patent References:

WO2003065406A1

2003-08-07

Foreign References:

JP2001236922A	2001-08-31
JP2001236921A	2001-08-31
JPH07325020A	1995-12-12

Other References: