Title:
MASS SPECTROMETER
Document Type and Number:
WIPO Patent Application WO/2017/046849
Kind Code:
A1
Abstract:
The present invention has: ion sources (1, 2); a mass spectrometry unit (11) disposed in a vacuum chamber (6); a first flow path (110) and a second flow path (101) that introduce ions produced by the ion sources to the mass spectrometry unit inside the vacuum chamber; and a blocking mechanism (30) for selectively blocking ions and neutral gas introduced to the mass spectrometry unit through the first flow path or ions and neutral gas introduced to the mass spectrometry unit through the second flow path. The distance (d2) between a flow path outlet (112) of the first flow path on the mass spectrometry unit side and a flow path outlet (113) of the second flow path on the mass spectrometry side is set to be shorter than the distance (d1) between a flow path inlet (110) of the first flow path on the ion source side and a flow path inlet (111) of the second flow path on the ion source side.
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Inventors:
SUGIYAMA MASUYUKI (JP)
SATAKE HIROYUKI (JP)
HASEGAWA HIDEKI (JP)
NISHIMURA KAZUSHIGE (JP)
SATAKE HIROYUKI (JP)
HASEGAWA HIDEKI (JP)
NISHIMURA KAZUSHIGE (JP)
Application Number:
PCT/JP2015/076021
Publication Date:
March 23, 2017
Filing Date:
September 14, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J49/06; G01N27/62
Foreign References:
| JP2003521800A | 2003-07-15 | |||
| JP2012521072A | 2012-09-10 | |||
| JP2009537070A | 2009-10-22 | |||
| JP2004525483A | 2004-08-19 | |||
| JP2004511772A | 2004-04-15 | |||
| JP2000057989A | 2000-02-25 | |||
| JP2003331777A | 2003-11-21 | |||
| JP2004505407A | 2004-02-19 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
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