Title:
MASS SPECTROMETRY METHOD
Document Type and Number:
WIPO Patent Application WO/2015/087645
Kind Code:
A1
Abstract:
For the purpose of cleaning the inside of a chamber having a mass separator of a mass spectrometer quickly without opening the inside of the chamber to the atmosphere, a large amount of cleaning gas capable of separating a contaminant adhered to the internal walls of the mass spectrometer is introduced into the chamber via a pulse valve so that the maximum chamber pressure value in a cleaning step is higher than the maximum chamber pressure value in a sample measurement step.
Inventors:
KUMANO SHUN (JP)
SUGIYAMA MASUYUKI (JP)
YAMADA MASUYOSHI (JP)
NISHIMURA KAZUSHIGE (JP)
HASHIMOTO YUICHIRO (JP)
MOROKUMA HIDETOSHI (JP)
SUGIYAMA MASUYUKI (JP)
YAMADA MASUYOSHI (JP)
NISHIMURA KAZUSHIGE (JP)
HASHIMOTO YUICHIRO (JP)
MOROKUMA HIDETOSHI (JP)
Application Number:
PCT/JP2014/079676
Publication Date:
June 18, 2015
Filing Date:
November 10, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
G01N27/62; G01N27/68; H01J49/10; H01J49/26
Foreign References:
| JP2013061324A | 2013-04-04 | |||
| JP2006153762A | 2006-06-15 | |||
| JP2007170985A | 2007-07-05 | |||
| JP2002298776A | 2002-10-11 | |||
| JP2012252881A | 2012-12-20 | |||
| JP2010025932A | 2010-02-04 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
Yusuke Hiraki (JP)
Yusuke Hiraki (JP)
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