Title:
MASS SPECTROSCOPE AND LASER BEAM MONITORING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/138736
Kind Code:
A1
Abstract:
A mass spectroscope 1 is provided with a gate valve 4 for opening/closing an opening 201 that communicates the inside of a first chamber 21 and the inside of a second chamber 22 with each other. The surface of a cover section 42 of the gate valve 4 is treated so as to make it possible to monitor a laser beam. Therefore, if the surface of the cover section 42 of the gave valve 4 is irradiated with a laser beam before starting analysis, and while confirming the surface, a mirror 6 and a lens 7 are adjusted so that the irradiation position of the laser beam is at the center of the cover section 42, the irradiation position of the laser beam can be an accurate position. Consequently, it is made possible to simply adjust the irradiation position of the laser beam.
Inventors:
SHICHI HIDEHARU (JP)
Application Number:
PCT/JP2018/044580
Publication Date:
July 18, 2019
Filing Date:
December 04, 2018
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
H01J49/16
Foreign References:
| JP2016115565A | 2016-06-23 | |||
| US20040183010A1 | 2004-09-23 | |||
| JPS59192258U | 1984-12-20 | |||
| JPS5728973U | 1982-02-16 |
Attorney, Agent or Firm:
YOSHIMOTO, Tsutomu et al. (JP)
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