Title:
MASS SPECTROSCOPY DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/171378
Kind Code:
A1
Abstract:
Provided is a mass spectroscopy device in which ions and/or particles that were not drawn into an introduction tube or an introduction hole are prevented from diffusing into a chamber. This mass spectroscopy device (1) comprises: an ionization chamber (10) for ionizing an analysis position on a sample (S) by the irradiation of a laser beam; an analysis chamber (23) including a mass spectroscope (24) that detects ions; and an intermediate vacuum chamber (21, 22) arranged between the ionization chamber (10) and the analysis chamber (23). The mass spectroscopy device is provided with an introduction tube (12) or an introduction hole that links the inside of a housing (11) of the ionization chamber (10) and the inside of the intermediate vacuum chamber (21). The mass spectroscopy device comprises a discharge tube (13), and a fan (15) that draws air into the discharge tube (13). By driving the fan (15), air including ions and/or particles that were not introduced into the introduction tube (12) or the introduction hole is sucked into the discharge tube (13).
Inventors:
HARADA TAKAHIRO (JP)
Application Number:
PCT/JP2014/060311
Publication Date:
October 23, 2014
Filing Date:
April 09, 2014
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
H01J49/26; H01J49/10
Domestic Patent References:
| WO2012056730A1 | 2012-05-03 |
Foreign References:
| JP2010537371A | 2010-12-02 | |||
| JP2007066903A | 2007-03-15 | |||
| JPH0676789A | 1994-03-18 | |||
| JPH10247471A | 1998-09-14 | |||
| JP2009054441A | 2009-03-12 |
Other References:
See also references of EP 2988316A4
Attorney, Agent or Firm:
KASHIMA, YOSHIO (JP)
KAJIMA Yoshio (JP)
KAJIMA Yoshio (JP)
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