Title:
MASTER FOR PRODUCING STAMPER
Document Type and Number:
WIPO Patent Application WO/2011/125099
Kind Code:
A1
Abstract:
Disclosed is a master for producing a stamper. A master (10) comprises: a substrate (40) including a first material (20); a region which includes a second material (30) and is formed on the surface of the substrate (40); and protrusions (50) which are formed on the surface of the substrate (40). The first material (20) is silicon, and the second material (30) is selected from silicon oxide, aluminium oxide, titanium oxide and glass.
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Inventors:
KASHIWADA, Saori (())
柏田沙織 (())
OHSAWA, Yuichi (())
大沢裕一 (())
ITO, Junichi (())
柏田沙織 (())
OHSAWA, Yuichi (())
大沢裕一 (())
ITO, Junichi (())
Application Number:
JP2010/002454
Publication Date:
October 13, 2011
Filing Date:
April 02, 2010
Export Citation:
Assignee:
KABUSHIKI KAISHA TOSHIBA (1-1 Shibaura 1-chome, Minato-ku Tokyo, 01, 〒1058001, JP)
株式会社 東芝 (〒01 東京都港区芝浦一丁目１番１号 Tokyo, 〒1058001, JP)
KASHIWADA, Saori (())
柏田沙織 (())
OHSAWA, Yuichi (())
大沢裕一 (())
株式会社 東芝 (〒01 東京都港区芝浦一丁目１番１号 Tokyo, 〒1058001, JP)
KASHIWADA, Saori (())
柏田沙織 (())
OHSAWA, Yuichi (())
大沢裕一 (())
International Classes:
G11B7/26
Attorney, Agent or Firm:
SAGOI, Masayuki (1-1 Shibaura 1-chome, Minato-k, Tokyo 01, 〒1058001, JP)
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Claims: