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Patent Searching and Data


Title:
MATCHING BOX AND MATCHING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/002196
Kind Code:
A1
Abstract:
Provided is a matching box comprising the following: a directional coupler that detects traveling waves and reflected waves; a matching circuit having a first variable capacitance capacitor, a second variable capacitance capacitor, and inductance; and a control unit that calculates a reflection coefficient on the basis of the traveling waves and the reflected waves, and controls a capacitance value VC1 of the first variable capacitance capacitor and a capacitance value VC2 of the second variable capacitance capacitor, wherein the control unit changes VC2 if the distance between a matching circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, and the calculated reflection coefficient is greater than a prescribed value, and changes VC1 if such distance is set to be no greater than the prescribed value and when the value of such distance becomes no greater than the prescribed value, thereby reducing the reflection coefficient.

Inventors:
FUJIMOTO NAOYA (JP)
KATO NORIKAZU (JP)
OSHIDA YOSHIYUKI (JP)
Application Number:
JP2015/068820
Publication Date:
January 05, 2017
Filing Date:
June 30, 2015
Export Citation:
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Assignee:
HITACHI INT ELECTRIC INC (JP)
International Classes:
H05H1/46; H01L21/3065; H01L21/31; H03H7/40
Foreign References:
JP2014241724A2014-12-25
JPH0563604A1993-03-12
JP2010045664A2010-02-25
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
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