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Patent Searching and Data


Title:
MATCHING DEVICE AND MATCHING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/136444
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a matching algorithm that converges to a matching point even in any load impedance. A matching device is provided with: a directional coupler that detects a traveling wave and a reflected wave; a matching circuit that has a first variable capacitance capacitor, a second variable capacitance capacitor and an inductance; and a control unit that calculates a reflection coefficient on the basis of the traveling wave and the reflected wave and controls a capacitance value VC1 of the first variable capacitance capacitor and a capacitance value VC2 of the second variable capacitance capacitor. The control unit changes VC2 such that VC2 goes to a circle drawn by the trajectory of the reflection coefficient passing through a matching point on a Smith chart, fine-tunes VC1 on the basis of an expected intersection point with the circle, and when the distance between the calculated reflection coefficient and the circle becomes a predetermined value or less, changes VC1 such that the calculated reflection coefficient approaches zero, and fine-tunes VC2.

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Inventors:
FUJIMOTO NAOYA (JP)
OSHIDA YOSHIYUKI (JP)
KATO NORIKAZU (JP)
Application Number:
PCT/JP2016/053676
Publication Date:
September 01, 2016
Filing Date:
February 08, 2016
Export Citation:
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Assignee:
HITACHI INT ELECTRIC INC (JP)
International Classes:
H03H7/40; H03H11/30; H05H1/46
Domestic Patent References:
WO2014037994A12014-03-13
WO2014203346A12014-12-24
Foreign References:
US20100225411A12010-09-09
JP2001274651A2001-10-05
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