Title:
MATERIAL DEPOSITION
Document Type and Number:
WIPO Patent Application WO1999029917
Kind Code:
A3
Abstract:
A method of depositing a material on a substrate comprises the steps of: (a) passing a precursor liquid through an outlet to generate a stream of droplets of the precursor liquid directed towards the substrate; (b) applying an electric field between the outlet and the substrate; and (c) generating a flame between the outlet and the substrate (50) so that the stream of droplets of the precursor liquid from the outlet (60) pass through the flame before reaching the substrate (50).
Inventors:
CHOY KWANG-LEONG (GB)
CHANG ISAAC TSZ HONG (GB)
CHANG ISAAC TSZ HONG (GB)
Application Number:
PCT/GB1998/003636
Publication Date:
July 22, 1999
Filing Date:
December 07, 1998
Export Citation:
Assignee:
IMPERIAL COLLEGE (GB)
CHOY KWANG LEONG (GB)
CHANG ISAAC TSZ HONG (GB)
CHOY KWANG LEONG (GB)
CHANG ISAAC TSZ HONG (GB)
International Classes:
C03B19/14; C23C16/44; C23C16/453; (IPC1-7): C23C16/44
Domestic Patent References:
| WO1997021848A1 | 1997-06-19 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 005, no. 054 (C - 050) 15 April 1981 (1981-04-15)
PATENT ABSTRACTS OF JAPAN vol. 006, no. 143 (C - 117) 3 August 1982 (1982-08-03)
PATENT ABSTRACTS OF JAPAN vol. 098, no. 001 30 January 1998 (1998-01-30)
PATENT ABSTRACTS OF JAPAN vol. 014, no. 227 (C - 0718) 15 May 1990 (1990-05-15)
PATENT ABSTRACTS OF JAPAN vol. 013, no. 262 (C - 608) 16 June 1989 (1989-06-16)
PATENT ABSTRACTS OF JAPAN vol. 006, no. 143 (C - 117) 3 August 1982 (1982-08-03)
PATENT ABSTRACTS OF JAPAN vol. 098, no. 001 30 January 1998 (1998-01-30)
PATENT ABSTRACTS OF JAPAN vol. 014, no. 227 (C - 0718) 15 May 1990 (1990-05-15)
PATENT ABSTRACTS OF JAPAN vol. 013, no. 262 (C - 608) 16 June 1989 (1989-06-16)
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