Title:
MATERIAL FOR PURIFICATION OF SEMICONDUCTOR POLISHING SLURRY, MODULE FOR PURIFICATION OF SEMICONDUCTOR POLISHING SLURRY AND PROCESS FOR PRODUCING SEMICONDUCTOR POLISHING SLURRY
Document Type and Number:
WIPO Patent Application WO/2004/084287
Kind Code:
A1
Abstract:
A material for purification of semiconductor polishing slurry that without changing of pH value, is capable of efficiently purifying a polishing slurry to thereby not only prevent metal contamination of a polished object as effectively as possible but also achieve recycling of polishing slurry without any problem; a relevant module for purification of semiconductor polishing slurry; and a process for producing a semiconductor polishing slurry with the use thereof. In particular, a material for purification of semiconductor polishing slurry characterized in that it comprises a fibrous substrate having a functional group capable of forming a metal chelate or such a functional group together with hydroxyl fixed onto at least surface thereof. This material for purification of semiconductor polishing slurry is, for example, used in such a manner that it is inserted in a container fitted with polishing slurry inflow port and outflow port while ensuring passage of polishing slurry flow.
Inventors:
Abe, Mitsugu c/o NOMURA MICRO SCIENCE CO. LTD. (2-9-8, Okada, Atsugi-sh, Kanagawa 21, 24300, JP)
Ito, Osamu c/o Yokkaichi Factory of CHUBU CHELEST CO. LTD. (3-3, Hinagahigashi 3-chome, Yokkaichi-sh, Mie 86, 51008, JP)
Ogitsu, Masaaki (12-22, Hanabatake 1-chome Tsukuba-sh, Ibaraki 61, 30032, JP)
Nambu, Nobuyoshi c/o Yokkaichi, Factory Of (Chubu Chelest Co. Ltd.,, 3-3, Hinagahigashi 3-chom, Yokkaichi-shi Mie, 510-0886, JP)
Inomata, Kazuo c/o NITIVY COMPANY LIMITED (1-2 Kyobashi 3-chom, Chuo-ku Tokyo, 104-0031, JP)
Ito, Osamu c/o Yokkaichi Factory of CHUBU CHELEST CO. LTD. (3-3, Hinagahigashi 3-chome, Yokkaichi-sh, Mie 86, 51008, JP)
Ogitsu, Masaaki (12-22, Hanabatake 1-chome Tsukuba-sh, Ibaraki 61, 30032, JP)
Nambu, Nobuyoshi c/o Yokkaichi, Factory Of (Chubu Chelest Co. Ltd.,, 3-3, Hinagahigashi 3-chom, Yokkaichi-shi Mie, 510-0886, JP)
Inomata, Kazuo c/o NITIVY COMPANY LIMITED (1-2 Kyobashi 3-chom, Chuo-ku Tokyo, 104-0031, JP)
Application Number:
PCT/JP2004/003642
Publication Date:
September 30, 2004
Filing Date:
March 18, 2004
Export Citation:
Assignee:
NOMURA MICRO SCIENCE CO., LTD. (2-9-8, Okada Atsugi-sh, Kanagawa 21, 24300, JP)
MARUZEN CHEMICALS CO., LTD. (4-7 Dosho-machi 2-chome, Chuo-ku Osaka-sh, Osaka 45, 54100, JP)
NITIVY COMPANY LIMITED (1-2 Kyobashi 3-chome, Chuo-ku Tokyo, 31, 10400, JP)
CHELEST CORPORATION (2-7-1102, Asahimachi 1-chome Abeno-ku, Osaka-sh, Osaka 51, 54500, JP)
CHUBU CHELEST CO., LTD. (2-7-1102, Asahimachi 1-chome Abeno-ku, Osaka-sh, Osaka 51, 54500, JP)
Abe, Mitsugu c/o NOMURA MICRO SCIENCE CO. LTD. (2-9-8, Okada, Atsugi-sh, Kanagawa 21, 24300, JP)
Ito, Osamu c/o Yokkaichi Factory of CHUBU CHELEST CO. LTD. (3-3, Hinagahigashi 3-chome, Yokkaichi-sh, Mie 86, 51008, JP)
Ogitsu, Masaaki (12-22, Hanabatake 1-chome Tsukuba-sh, Ibaraki 61, 30032, JP)
Nambu, Nobuyoshi c/o Yokkaichi, Factory Of (Chubu Chelest Co. Ltd.,, 3-3, Hinagahigashi 3-chom, Yokkaichi-shi Mie, 510-0886, JP)
Inomata, Kazuo c/o NITIVY COMPANY LIMITED (1-2 Kyobashi 3-chom, Chuo-ku Tokyo, 104-0031, JP)
MARUZEN CHEMICALS CO., LTD. (4-7 Dosho-machi 2-chome, Chuo-ku Osaka-sh, Osaka 45, 54100, JP)
NITIVY COMPANY LIMITED (1-2 Kyobashi 3-chome, Chuo-ku Tokyo, 31, 10400, JP)
CHELEST CORPORATION (2-7-1102, Asahimachi 1-chome Abeno-ku, Osaka-sh, Osaka 51, 54500, JP)
CHUBU CHELEST CO., LTD. (2-7-1102, Asahimachi 1-chome Abeno-ku, Osaka-sh, Osaka 51, 54500, JP)
Abe, Mitsugu c/o NOMURA MICRO SCIENCE CO. LTD. (2-9-8, Okada, Atsugi-sh, Kanagawa 21, 24300, JP)
Ito, Osamu c/o Yokkaichi Factory of CHUBU CHELEST CO. LTD. (3-3, Hinagahigashi 3-chome, Yokkaichi-sh, Mie 86, 51008, JP)
Ogitsu, Masaaki (12-22, Hanabatake 1-chome Tsukuba-sh, Ibaraki 61, 30032, JP)
Nambu, Nobuyoshi c/o Yokkaichi, Factory Of (Chubu Chelest Co. Ltd.,, 3-3, Hinagahigashi 3-chom, Yokkaichi-shi Mie, 510-0886, JP)
Inomata, Kazuo c/o NITIVY COMPANY LIMITED (1-2 Kyobashi 3-chom, Chuo-ku Tokyo, 104-0031, JP)
International Classes:
B01J45/00; B01J47/12; B24B37/00; B24B57/02; C23F1/46; (IPC1-7): H01L21/304; B24B57/02; B24B37/00; B01J45/00; B01J47/12
Attorney, Agent or Firm:
Suyama, Saichi (Kanda Higashiyama Bldg. 1, Kandata-cho 2-chome, Chiyoda-k, Tokyo, 101-0046, JP)
Download PDF: