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Title:
MEANDERING CORRECTION DEVICE, SUBSTRATE PROCESSING DEVICE, AND MEANDERING CORRECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2018/051571
Kind Code:
A1
Abstract:
This meandering correction device comprises a conveyance mechanism (10), a thickness measurement unit (20), a meandering prediction unit (63), and a meandering correction unit (40). The conveyance mechanism (10) conveys a long strip-shaped substrate in the longitudinal direction along a conveyance path. The thickness measurement unit (20) measures the thickness of the substrate in a plurality of measurement regions differing in position in the width direction on the conveyance path of the substrate. The meandering prediction unit (63) predicts subsequent meandering of the substrate on the basis of the thickness of the substrate, and outputs meandering prediction information. The meandering correction unit (40) corrects the position in the width direction of the substrate on the basis of the meandering prediction information. Since meandering correction is made on the basis of the thickness of the substrate, it is possible to properly correct the position in the width direction of the substrate without depending only on an edge sensor.

Inventors:
KAJIYA Hiroyuki (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
HAYASHI Shinji (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
Application Number:
JP2017/016712
Publication Date:
March 22, 2018
Filing Date:
April 27, 2017
Export Citation:
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Assignee:
SCREEN HOLDINGS CO., LTD. (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
International Classes:
B65H26/00; B65H23/038
Foreign References:
JP2014024617A2014-02-06
JP2008044787A2008-02-28
JP2009173383A2009-08-06
JP2012158412A2012-08-23
JPH05508375A1993-11-25
Attorney, Agent or Firm:
NISHIDA Takami (4F Nishitemma Park Bldg. 3rd. 3-14-16, Nishitemma Kita-ku, Osaka-sh, Osaka 47, 〒5300047, JP)
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