Title:
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2015/132878
Kind Code:
A1
Abstract:
A measurement device (1) is provided with a separation and irradiation means (200) for separating laser light (Li) into a plurality of light beams (Ld1, Ld2) and irradiating the plurality of light beams onto different parts (401, 402) of an object under measurement (400) at different angles of incidence and a light reception means (500) for receiving scattered light (Ls1, Ls2) resulting from the plurality of light beams being scattered by the object under measurement. This measurement device reduces damage to an object under measurement resulting from laser light and makes suitable measurement possible.
Inventors:
KIKUCHI IKUYA (JP)
ITO ATSUYA (JP)
ITO ATSUYA (JP)
Application Number:
PCT/JP2014/055447
Publication Date:
September 11, 2015
Filing Date:
March 04, 2014
Export Citation:
Assignee:
PIONEER CORP (JP)
International Classes:
G01F1/66; G01P5/00
Foreign References:
| JPH0425787A | 1992-01-29 | |||
| JP2012098169A | 2012-05-24 |
Attorney, Agent or Firm:
EGAMI, Tatsuo et al. (JP)
Tatsuo Egami (JP)
Tatsuo Egami (JP)
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