Title:
MEASUREMENT DEVICE AND MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2015/132880
Kind Code:
A1
Abstract:
A measurement device (1) is provided with a separation and irradiation means (200) for separating laser light into a first light beam (Ld1) and a second light beam (Ld2) and irradiating the first light beam onto an object under measurement (400), a diffusion means (600) for diffusing the second light beam, and a reception means (500) for receiving the first light beam (Ls) scattered by the object under measurement and the second light beam (Lr) diffused by the diffusion means. This measurement device enables suitable measurement of an object under measurement through detection of a scattered first light beam and a diffused second light beam.
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Inventors:
KIKUCHI IKUYA (JP)
ITO ATSUYA (JP)
ITO ATSUYA (JP)
Application Number:
PCT/JP2014/055453
Publication Date:
September 11, 2015
Filing Date:
March 04, 2014
Export Citation:
Assignee:
PIONEER CORP (JP)
International Classes:
G01F1/66; G01B9/02; G01P5/00
Foreign References:
| JP2001066247A | 2001-03-16 | |||
| JPH03238354A | 1991-10-24 | |||
| JPH09257819A | 1997-10-03 | |||
| JPH07167879A | 1995-07-04 | |||
| JPH109811A | 1998-01-16 |
Attorney, Agent or Firm:
EGAMI, Tatsuo et al. (JP)
Tatsuo Egami (JP)
Tatsuo Egami (JP)
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